DESIGN AND ANALYSIS OF MEMS BASED CAPACITIVE ACCELEROMETER. International Journal of Multidisciplinary Engineering In Current Research, [S. l.], v. 8, n. 12, p. 186–193, 2023. Disponível em: https://ijmec.com/index.php/multidisciplinary/article/view/372. Acesso em: 5 feb. 2025.