DESIGN AND ANALYSIS OF MEMS BASED CAPACITIVE ACCELEROMETER

Abstract

In the project 'Design and Analysis of Capacitive Accelerometer,' the focus was on evaluating slotted shapes
like Circle, Square, and Rectangle on a Square Plate Capacitive Accelerometer. Uniform slotted areas of the shapes
were simulated using COMSOL Multiphysics software to see how these shapes react when we push them (Applying
stress) and see how thickness of the di-electric material changes accordingly. We wanted to know how much they move
when pushed and how their ability to hold electricity changes (Capacitance) with the material's thickness. Surprisingly,
we found out that the Circle Slotted shape moves the most when applied stress. Also, changing the material's thickness
makes a big difference in how much electricity the sensor can hold. These discoveries are a step forward in making
sensors that can sense movements better and work well in different situations