DESIGN AND ANALYSIS OF HYDROGEN GAS SENSING USING Zn2TiO4 THIN FILM
Keywords:
Hydrogen gas sensor, Zn2TiO4 thin film, Gas sensing properties, Room temperature sensing, Low ppm concentrations, Response time, Langmuir adsorption model, Si/SiO2 substrate, Sensor response, Phase and crystal structure, Adsorption processes, Environmental monitoring, Gas detection .Abstract
We are using of Zn2TiO4 thin film for H2 sensing. Zn2TiO4 thin film is formed on Si/SiO2 substrate
by a spin coating process and Al is used as electrodes. This device has excellent hydrogen (H2) gas sensing
properties. The phase and crystal structure of the thin film was studied using X-ray diffraction. The sensor
responds linearly at room temperatureto H2 gas concentrations ranging from 50 to 250 ppm and shows a good
sensitivity toward low ppm of H2. The response time of the sensor is about 76 s at 250-ppm H2. We could fit
the sensor response to the Langmuir adsorption model